The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Jan. 08, 2019
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Inventors:
Assignee:
MURATA MANUFACTURING CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/047 (2006.01); H01L 41/053 (2006.01); H03H 9/25 (2006.01); H03H 9/54 (2006.01); H01L 41/18 (2006.01); H03H 9/05 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02574 (2013.01); H01L 41/047 (2013.01); H01L 41/053 (2013.01); H01L 41/18 (2013.01); H03H 9/02566 (2013.01); H03H 9/058 (2013.01); H03H 9/25 (2013.01); H03H 9/54 (2013.01);
Abstract
An elastic wave device includes a SiNlayer stacked directly or indirectly on a supporting substrate made of a semiconductor material, a piezoelectric film stacked on directly or indirectly the SiNlayer, and an interdigital transducer electrode stacked directly or indirectly on at least one main surface of the piezoelectric film. In the SiNlayer, x is about 1.34 or more and about 1.66 or less.