The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Aug. 02, 2018
Sharp Kabushiki Kaisha, Sakai, JP;
Katsunori Misaki, Yonago, JP;
SHARP KABUSHIKI KAISHA, Sakai, JP;
Abstract
A method for manufacturing a scanning antenna with a plurality of antenna units arrayed therein, the scanning antenna including a TFT substrate including a first dielectric substrate, a TFT, gate bus lines, source bus lines, and a plurality of patch electrodes, a slot substrate including a second dielectric substrate and a slot electrode including a plurality of slots disposed corresponding to the plurality of patch electrodes, a liquid crystal layer, and a reflective conductive plate, includes a step (a) of depositing a first conductive film containing copper on a first main surface of the second dielectric substrate, a step (b) of, after step (a), bringing the first conductive film into contact with an atmosphere to form an oxide film on a surface of the first conductive film, and a step (c) of, after step (b), depositing a second conductive film containing copper on the oxide film.