The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2022

Filed:

Feb. 16, 2018
Applicant:

Jsw Aktina System Co., Ltd., Yokohama, JP;

Inventors:

Yuki Suzuki, Yokohama, JP;

Takahiro Fuji, Yokohama, JP;

Takahiro Mikami, Yokohama, JP;

Yoshihiro Yamaguchi, Yokohama, JP;

Ryo Shimizu, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02675 (2013.01); H01L 21/67115 (2013.01); H01L 21/67784 (2013.01);
Abstract

A laser irradiation apparatus () according to an embodiment includes a laser generation device () configured to generate laser light, and a levitation unit () configured to levitate an object to be processed () to which the laser light is applied. The levitation unit () includes a first area and a second area, and the first and second areas are arranged so that, in a plane view, a focal point of the laser light overlaps the first area and the focal point of the laser light does not overlap the second area. A surface part of the second area is formed of a metal member.


Find Patent Forward Citations

Loading…