The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2022

Filed:

Apr. 02, 2018
Applicant:

Agm Container Controls, Inc., Tucson, AZ (US);

Inventors:

Andrew Tudhope, Tucson, AZ (US);

Thomas B. Casserly, Tucson, AZ (US);

Marion D. McEuen, Tucson, AZ (US);

Jeffrey F. Vogler, Tucson, AZ (US);

Assignee:

AGM CONTAINER CONTROLS, INC., Tucson, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/503 (2006.01); C23C 16/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32027 (2013.01); C23C 16/503 (2013.01); H01J 37/32 (2013.01); H01J 37/3244 (2013.01); H01J 37/32403 (2013.01); H01J 37/32568 (2013.01); H01J 37/32596 (2013.01); H01J 37/32899 (2013.01); C23C 16/04 (2013.01); H01J 37/3288 (2013.01); H01J 37/32477 (2013.01);
Abstract

A chemical vapor deposition system for coating one or more workpieces is described herein. The deposition system includes a plurality of processing chambers which may be operated independently to increase throughput of the deposition system. Each chamber includes a modular fixture that is configured to maintain the workpieces in a predetermined arrangement which allows for a hollow cathode effect to be maintained in an Interior space of the chamber. The deposition system achieves significantly faster, higher-quality deposition and more complete, conformal coverage.


Find Patent Forward Citations

Tudhope, Andrew. (2022). Systems and methods for coating surfaces (U.S. Patent No. 11348759). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11348759

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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