The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Jul. 23, 2019
Asahi Kasei Microdevices Corporation, Tokyo, JP;
Hiromi Fujita, Tokyo, JP;
Yoshihiko Shibata, Tokyo, JP;
Asahi Kasei Microdevices Corporation, Tokyo, JP;
Abstract
Obtaining control conditions through trial and error is inefficient. Provided is a learning processor including a control condition acquiring section that acquires control condition data indicating a control condition of a film deposition apparatus; a film characteristic acquiring section that acquires film characteristic data indicating a characteristic of a film deposited by the film deposition apparatus that has been caused to operate according to the control condition indicated by the control condition data; and a learning processing section that performs learning processing of a model that outputs recommended control condition data indicating the control condition of the film deposition apparatus that is recommended in response to input of target film characteristic data indicating a target film characteristic, using learning data that includes the acquired control condition data and film characteristic data.