The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Sep. 12, 2018
Applicant:
Showa Denko K.k., Tokyo, JP;
Inventor:
Daizo Endo, Ichihara, JP;
Assignee:
SHOWA DENKO K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01F 41/32 (2006.01); C23C 14/35 (2006.01); C23C 14/06 (2006.01); G01R 33/02 (2006.01); H01F 10/08 (2006.01);
U.S. Cl.
CPC ...
G01R 33/02 (2013.01); C23C 14/06 (2013.01); C23C 14/35 (2013.01); H01F 10/08 (2013.01); H01F 41/32 (2013.01);
Abstract
A method of manufacturing a magnetic sensor includes: a soft magnetic material layer deposition process depositing a soft magnetic material layer () constituting a sensitive part () sensing a magnetic field on a substrate () by magnetron sputtering; and a sensitive part formation process forming the sensitive part () sensing the magnetic field in a portion of the soft magnetic material layer () where uniaxial magnetic anisotropy is provided by a magnetic field used for magnetron sputtering of the soft magnetic material layer ().