The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2022

Filed:

Dec. 19, 2019
Applicant:

Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd., Hubei, CN;

Inventors:

Yazhou Li, Hubei, CN;

Gaozhen Wang, Hubei, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); H01L 51/56 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); H01L 51/0005 (2013.01); H01L 51/56 (2013.01); H01L 51/5253 (2013.01);
Abstract

A method of preparing a thin film and a method of manufacturing a display device are disclosed. The method of preparing a thin film includes the following steps: providing a substrate having a film formation region and a non-film formation region surrounding the film formation region; forming a gas precursor repellent layer in the non-film formation region; and depositing a gas precursor on the film formation region by atomic deposition to form the film. The method of preparing a film and the method of manufacturing a display device of the present invention can effectively achieve the effect of limiting the boundary of the film by forming the gas precursor repellent layer in the non-film formation region, and finally eliminate the problem of boundary epitaxial caused by atomic deposition.


Find Patent Forward Citations

Loading…