The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2022

Filed:

Sep. 28, 2018
Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventors:

Kyoko Okita, Osaka, JP;

Tsubasa Honke, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); C30B 29/36 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1608 (2013.01); C30B 29/36 (2013.01);
Abstract

Prescribed mathematical expressions are satisfied, where νrepresents a wave number indicating a peak corresponding to a folded mode of a longitudinal optical branch of a Raman spectrum of silicon carbide having a polytype of 4H and having zero stress, νrepresents a maximum value of a wave number indicating a peak corresponding to a folded mode of a longitudinal optical branch of a Raman spectrum of a silicon carbide substrate in a region from a first main surface to a second main surface, νrepresents a minimum value of the wave number indicating the peak corresponding to the folded mode of the longitudinal optical branch of the Raman spectrum, and νrepresents a wave number indicating a peak corresponding to a folded mode of a longitudinal optical branch of a Raman spectrum of the silicon carbide substrate at the first main surface.


Find Patent Forward Citations

Loading…