The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Sep. 17, 2020
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Matthias Steiert, Ehrenkirchen, DE;
Karolina Gierl, Regensburg, DE;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); B81B 7/02 (2006.01); B81C 1/00 (2006.01); H01L 25/065 (2006.01); H01L 21/56 (2006.01); H01L 25/07 (2006.01); H01L 21/67 (2006.01); H01L 23/10 (2006.01); H01L 23/13 (2006.01);
U.S. Cl.
CPC ...
H01L 24/32 (2013.01); B81B 7/02 (2013.01); B81C 1/00238 (2013.01); H01L 24/27 (2013.01); H01L 25/0657 (2013.01); B81B 2201/02 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0315 (2013.01); B81B 2207/012 (2013.01); B81C 2203/032 (2013.01); H01L 2224/26135 (2013.01); H01L 2224/27515 (2013.01); H01L 2924/1433 (2013.01);
Abstract
A device includes a base substrate with a sensor component arranged thereon; a spacer layer on the base substrate, wherein the spacer layer is structured in order to predefine a cavity region, in which the sensor component is arranged in an exposed fashion on the base substrate, and a DAF tape element (DAF=Die-Attach-Film) on a stack element, wherein the DAF tape element mechanically fixedly connects the stack element to the spacer layer arranged on the base substrate and to obtain the cavity region.