The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Dec. 12, 2019
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Hideo Mizutani, Yokohama, JP;
Tohru Kiuchi, Tokyo, JP;
Toru Kawaguchi, Kawasaki, JP;
Takashi Masukawa, Yokohama, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B65H 75/28 (2006.01); H01L 21/673 (2006.01); B65H 19/22 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67126 (2013.01); B65H 75/28 (2013.01); B65H 75/285 (2013.01); H01L 21/67363 (2013.01); B65H 19/2276 (2013.01); B65H 2405/421 (2013.01); B65H 2601/25 (2013.01);
Abstract
A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.