The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Sep. 03, 2019
Kioxia Corporation, Tokyo, JP;
Yasuhito Yoshimizu, Yokkaichi Mie, JP;
Fuyuma Ito, Yokkaichi Mie, JP;
Hakuba Kitagawa, Yokkaichi Mie, JP;
Yohei Yamamoto, Yokkaichi Mie, JP;
Hisashi Okuchi, Yokkaichi Mie, JP;
Yuji Yamada, Kuwana Mie, JP;
KIOXIA CORPORATION, Tokyo, JP;
Abstract
According to an embodiment, the substrate treatment device includes a dilutor configured to dilute a first liquid containing a metal ion and exhibiting acidity. The device further includes a pH changer configured to change a pH of the first liquid before or after being diluted by the dilutor. The device further includes a substrate conditioner configured to treat the substrate using the first liquid, which is diluted by the dilutor and with the pH changed by the pH changer.