The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Feb. 14, 2018
Applicant:
Oerlikon Surface Solutions Ag, Pfaffikon, Pfaffikon, CH;
Inventors:
Joerg Vetter, Bergisch gladbach, DE;
Markus Willach, Bergisch Gladbach, DE;
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON, Pfaffikon, CH;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/32 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3402 (2013.01); C23C 14/325 (2013.01); H01J 37/32055 (2013.01);
Abstract
The present invention relates to a method for the evaporation of a cathode by means of cathodic arc evaporation, wherein the focal spot of the arc is forced to a predetermined track on the cathode surface by means of temporally and spatially controllable magnetic fields, wherein a predetermined removal of material of the cathode surface is produced. The invention also relates to a device for carrying out the method according to the invention.