The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Nov. 28, 2018
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Maolin Long, Santa Clara, CA (US);
Yuhou Wang, Fremont, CA (US);
Ying Wu, Livermore, CA (US);
Alex Paterson, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H03K 4/92 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32128 (2013.01); H01J 37/3211 (2013.01); H03K 4/92 (2013.01); H01J 2237/334 (2013.01);
Abstract
A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.