Abnormality diagnosis method of fluid supply line

Abstract

To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V, and Vcommunicating with each other fluid-tightly. The abnormality diagnosis method has: a valve operation step of opening/closing any one or more of a valve FV in a flow rate control device, a valve V, and a valve V; a pressure adjustment step of setting a part or all of flow passages Rand Rleading from the valve Vto the valve Vvia the flow rate control device to a vacuum state or a pressurization state; a pressure detection step of acquiring temporal pressure characteristics in a flow passage of the flow rate control device F by pressure detection mechanisms Pand P; and an abnormality determination step of comparing pressure characteristics at the time of abnormality diagnosis acquired by the pressure detection mechanisms Pand Pand pressure characteristics at the time of normality measured in advance under the same conditions, and determining whether or not there is an abnormality.