The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Jun. 20, 2019
Applicant:
Horiba Stec, Co., Ltd., Kyoto, JP;
Inventor:
Kentaro Nagai, Kyoto, JP;
Assignee:
HORIBA STEC, Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/06 (2006.01); G01F 15/00 (2006.01); G01F 1/36 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0623 (2013.01); G01F 1/363 (2013.01); G01F 15/005 (2013.01);
Abstract
In order to provide a flow rate control apparatus capable of reducing pressure loss due to a downstream valve while enhancing responsiveness in flow rate control, a controller is designed to control the downstream valve on the basis of a flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening. The controller is designed to control an upstream valve on the basis of the flow rate deviation when the valve opening of the downstream valve is the predetermined valve opening or more.