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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11340383 B1

PDFFull Text
Date of Patent:
May. 24, 2022

Filed:

Oct. 10, 2018

Hydroxide-catalysis bonding of optical components used in duv optical systems

Applicant:

Corning Incorporated, Corning, NY (US);

Inventors:

Michael Morgan Dunn, Palmyra, NY (US);

Todd Robert McMichael, Rochester, NY (US);

Paul Francis Michaloski, Rochester, NY (US);

Mark Ranney Westcott, Rochester, NY (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorneys:

Amy T. Lang

Kevin L. Bray

Primary Examiner:

Collin X Beatty

Assistant Examiner:

Grant A Gagnon

Int. Cl.
CPC ...
G02B 1/02 (2006.01); G02B 3/00 (2006.01); G02B 7/20 (2021.01); C03B 23/22 (2006.01); G03F 7/20 (2006.01); C03C 27/00 (2006.01);
U.S. Cl.
CPC ...
G02B 1/02 (2013.01); C03B 23/22 (2013.01); C03C 27/00 (2013.01); G02B 3/00 (2013.01); G03F 7/70158 (2013.01); G03F 7/70966 (2013.01); G02B 2003/0093 (2013.01);
Abstract

A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.

Find Patent Forward Citations

Dunn, Michael. (2022). Hydroxide-catalysis bonding of optical components used in duv optical systems (U.S. Patent No. 11340383). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11340383

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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