The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2022

Filed:

Jan. 31, 2018
Applicant:

Cameca Instruments Inc., Madison, WI (US);

Inventors:

Joseph Hale Bunton, Madison, WI (US);

Daniel Robert Lenz, Stoughton, WI (US);

Dana Jeffrey Shepard, Fitchburg, WI (US);

Assignee:

Cameca Instruments, Inc., Madison, WI (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/285 (2006.01); G01Q 60/30 (2010.01); G01N 27/626 (2021.01); G01N 27/66 (2006.01); G01Q 60/38 (2010.01);
U.S. Cl.
CPC ...
G01Q 60/30 (2013.01); G01N 27/628 (2013.01); G01N 27/66 (2013.01); G01Q 60/38 (2013.01); H01J 37/285 (2013.01);
Abstract

An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.


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