The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
May. 29, 2020
Applicant:
Mitsubishi Electric Corporation, Tokyo, JP;
Inventor:
Yasuo Nakajima, Tokyo, JP;
Assignee:
Mitsubishi Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 7/08 (2006.01); C25D 5/12 (2006.01); C25D 5/48 (2006.01); C25D 3/48 (2006.01); C25D 3/12 (2006.01); G01J 1/02 (2006.01); C25D 5/02 (2006.01); H01L 31/107 (2006.01); H01L 21/66 (2006.01); H01L 31/0224 (2006.01); G01J 1/42 (2006.01); G01J 5/02 (2022.01);
U.S. Cl.
CPC ...
C25D 7/08 (2013.01); C25D 3/12 (2013.01); C25D 3/48 (2013.01); C25D 5/022 (2013.01); C25D 5/12 (2013.01); C25D 5/48 (2013.01); G01J 1/0295 (2013.01); H01L 22/14 (2013.01); H01L 22/20 (2013.01); H01L 31/022408 (2013.01); H01L 31/1075 (2013.01); G01J 1/42 (2013.01); G01J 5/024 (2013.01);
Abstract
According to the present invention, a method for manufacturing a rear surface incident type light receiving device including a substrate, a light receiving unit formed on a surface of the substrate and an electrode formed on the light receiving unit and electrically connected to the light receiving unit includes a first step of performing, after formation of a part of the electrode, a characteristic inspection of the rear surface incident type light receiving device by applying a probe to a part of the electrode and a second step of reducing an area of the electrode in a plan view.