The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Aug. 28, 2020
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventor:
Joji Kuwahara, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B65G 47/91 (2006.01); G03F 7/20 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B65G 47/91 (2013.01); G03F 7/70733 (2013.01); H01L 21/677 (2013.01);
Abstract
Disclosed is a substrate treating system and a substrate transporting method. A substrate transport mechanism of an indexer block can take a substrate W into and out of a carrier placed on a platform. Moreover, the substrate transport mechanism transports the substrate W between two treatment layers at different height positions in a first treating block and a second treating block. Accordingly, any delivery block configured to move substrates between two treatment layers in an up-down direction is not necessarily provided between the indexer block and the treating block as in the prior art. This achieves suppression of a footprint of the substrate treating system.