The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Oct. 17, 2017
Applicant:
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Inventors:
Assignee:
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); B65G 49/07 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0033 (2013.01); B25J 15/00 (2013.01); B65G 49/07 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); H01L 21/68707 (2013.01); H01L 21/68728 (2013.01); H01L 21/677 (2013.01);
Abstract
A substrate gripping hand which grips a substrate with a disc shape, includes a base plate, and a guide member provided at the base plate, and having a L-shape when viewed from a horizontal direction, the guide member having a shape in which a base end portion of a bottom surface has a horizontal portion and a first corner portion which is a corner portion formed by the bottom surface and an inner wall surface has a curve line shape.