The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2022
Filed:
Feb. 28, 2019
Applicant:
Kyoto University, Kyoto, JP;
Inventors:
Norikazu Mizuochi, Kyoto, JP;
Hiromitsu Kato, Tsukuba, JP;
Toshiharu Makino, Tsukuba, JP;
Satoshi Yamasaki, Tsukuba, JP;
Assignee:
KYOTO UNIVERSITY, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); C01B 32/28 (2017.01); C01B 32/26 (2017.01); C23C 16/27 (2006.01); C30B 25/02 (2006.01); C30B 29/04 (2006.01); G01R 33/26 (2006.01); H01L 21/02 (2006.01); H01L 29/167 (2006.01); H01L 39/12 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1602 (2013.01); C01B 32/26 (2017.08); C01B 32/28 (2017.08); C23C 16/27 (2013.01); C30B 25/02 (2013.01); C30B 29/04 (2013.01); G01R 33/26 (2013.01); H01L 21/0262 (2013.01); H01L 21/02527 (2013.01); H01L 21/02576 (2013.01); H01L 29/167 (2013.01); H01L 39/12 (2013.01); C01P 2002/52 (2013.01); C01P 2006/40 (2013.01); C01P 2006/42 (2013.01);
Abstract
A sensor element including a diamond in which nitrogen-vacancy centers in a diamond crystal structure stabilize in a negative charge state. By ensuring that the diamond of the sensor element is n-type phosphorus-doped and contains nitrogen-vacancy centers in the crystal structure, the probability that nitrogen-vacancy centers in the diamond lattice are in a neutral state decreases, and the nitrogen-vacancy centers stabilize in a negative charge state.