The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2022

Filed:

Jan. 29, 2020
Applicant:

Kioxia Corporation, Minato-ku, JP;

Inventors:

Kenya Otaguro, Mie, JP;

Hisashi Nishimura, Yokohama, JP;

Assignee:

Kioxia Corporation, Minato-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 27/11582 (2017.01); H01L 23/532 (2006.01); H01L 27/1157 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 23/53257 (2013.01); H01L 27/1157 (2013.01);
Abstract

A semiconductor memory device according to an embodiment includes a substrate, a first conductive layer, first and second pillars. The substrate includes first to third regions. The first pillars are provided in the first region to penetrate the first conductive layer. The second pillars are provided in the second region or the third region to penetrate the first conductive layer. The second region includes first and second sub-regions. The first sub-region includes a contact corresponding to the first conductive layer. A coverage of the second pillars in the second sub-region is higher than a coverage of the second pillars in the first sub-region and lower than or equal to a coverage of the first pillars in the first region.


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