The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2022
Filed:
Oct. 15, 2020
National Cheng Kung University, Tainan, TW;
Chien-Sheng Liu, Tainan, TW;
Jie-Yu Zeng, Tainan, TW;
NATIONAL CHENG KUNG UNIVERSITY, Tainan, TW;
Abstract
An error measurement device and an error measurement method are provided. The optical measurement assembly of the error measurement device includes a light source, an optical lens, and a photoelectric sensor. The light beam emitted by the light source is transmitted to a sensing area on the photoelectric sensor to form a first optical path illuminating on a first light-spot position of the sensing area. The moving stage is moved by a linear displacement, so that the light beam is transmitted to the photoelectric sensor to form a second optical path illuminating on a second light-spot position of the sensing area. The processor calculates a movement error of the moving stage and controls the actuator to drive one or more of the light source, the optical lens, and the photoelectric sensor to perform a relative motion, so that the light beam illuminates on the first light-spot position again.