The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2022
Filed:
Feb. 13, 2020
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Kawasaki Robotics (Usa), Inc., Wixom, MI (US);
Masaya Yoshida, Himeji, JP;
Avish Ashok Bharwani, Santa Clara, CA (US);
Ming Zeng, San Jose, CA (US);
Simon Jeyapalan, Newark, CA (US);
Hajime Nakahara, San Jose, CA (US);
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
KAWASAKI ROBOTICS (USA), INC., Wixom, MI (US);
Abstract
A substrate transfer apparatus of the present invention includes: a robot including a hand configured to hold a substrate, and an arm configured to move the hand; a robot control device configured to set a moving path for the hand and control the arm such that the hand moves on the moving path toward a target position; and a camera disposed so as to be able to capture an image of the substrate held by the hand located at a predetermined confirmation position. The robot control device sets the moving path so as to pass through the confirmation position, obtains an image captured by the camera when the hand is located at the confirmation position, calculates a distance between a predetermined environment and the substrate which are taken in the image, and calculates a positional deviation amount from a reference position of the substrate on the basis of the distance.