The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2022

Filed:

Jan. 31, 2020
Applicant:

Reno Technologies, Inc., Wilmington, DE (US);

Inventors:

Imran Bhutta, Moorestown, NJ (US);

Michael Ulrich, Delran, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H03H 7/40 (2006.01); H01L 21/66 (2006.01); H03H 11/30 (2006.01); C23C 16/52 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01); H01L 22/26 (2013.01); H03H 7/40 (2013.01); H03H 11/30 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01);
Abstract

In one embodiment, an impedance matching network includes a mechanically variable capacitor (MVC), a second variable capacitor, and a control circuit. The control circuit carries out a first process of determining a second variable capacitor configuration for reducing a reflected power at the RF source output, and altering the second variable capacitor to the second variable capacitor configuration. The control circuit also carries out a second process of determining an RF source frequency, and, upon determining that the RF source frequency is outside, at a minimum, or at a maximum of a predetermined frequency range, determining a new MVC configuration to cause the RF source frequency, according to an RF source frequency tuning process, to be altered to be within or closer to the predetermined frequency range. The determination of the new MVC configuration is based on the RF source frequency and the predetermined frequency range.


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