The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2022
Filed:
Jul. 20, 2018
Applicant:
Beijing Sevenstar Flow Co., Ltd., Beijing, CN;
Inventors:
Assignee:
BEIJING SEVENSTAR FLOW CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D 7/06 (2006.01); G01F 7/00 (2006.01); G05B 19/416 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0635 (2013.01); G01F 7/00 (2013.01); G05B 19/416 (2013.01); G05B 2219/37371 (2013.01);
Abstract
The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.