The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2022

Filed:

Dec. 19, 2019
Applicant:

Carl Zeiss Jena Gmbh, Jena, DE;

Inventors:

Thomas Koehler, Jena, DE;

Christian Schindler, Weimar, DE;

Hannes Scheibe, Magdala, DE;

Eckhard Roth, Grossloebichau, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/402 (2006.01); H01J 37/30 (2006.01); H01J 37/302 (2006.01);
U.S. Cl.
CPC ...
G05B 19/402 (2013.01); H01J 37/30 (2013.01); H01J 37/302 (2013.01); G05B 2219/49031 (2013.01);
Abstract

A device and method for the controlled processing of at least one workpiece (), comprising a workpiece carrier () on which at least one workpiece receptacle () is present remote from a rotary shaft (), at least one processing unit () and at least one inspection unit (), which are offset relative to the rotary shaft () by an angular distance (β) from one another, are each arranged so that they can be adjusted and moved in a translational manner radially with respect to the rotary shaft (), so that a processing beam (E) and an inspection beam (P), offset relative to one another by the angular distance (β), describe the same spiral-shaped movement path (S) relative to the workpiece carrier (), and the inspection results derived at an inspection point (P) are used to control process parameters in order to change the effect of the processing beam (E).


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