The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2022
Filed:
Aug. 08, 2018
Toshiba Mitsubishi-electric Industrial Systems Corporation, Chuo-ku, JP;
The University of Tokyo, Bunkyo-ku, JP;
Masaaki Furukawa, Tokyo, JP;
Tetsuo Yoshimitsu, Tokyo, JP;
Yuichi Tsuboi, Tokyo, JP;
Kunihiko Hidaka, Tokyo, JP;
Akiko Kumada, Tokyo, JP;
Hisatoshi Ikeda, Tokyo, JP;
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION, Chuo-ku, JP;
THE UNIVERSITY OF TOKYO, Bunkyo-ku, JP;
Abstract
A three-dimensional surface potential distribution measurement system for measuring a surface potential of a measurement object comprises: a laser light source; a Pockels crystal exhibiting Pockels effect in which a refractive index changes depending on potential difference between the first end surface and the second end surface; a mirror disposed so as to be attached stationarily to the second end surface of the Pockels crystal; a photodetector to detect a light intensity of the laser light corresponding to the potential difference of the Pockels crystal; a housing that holds those elements; a three-dimensional motion-driver capable of three-dimensionally moving the housing; and a driving controller that controls the three-dimensional motion-driver.