The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2022
Filed:
May. 07, 2019
Applicant:
Solayer Gmbh, Kesselsdorf, DE;
Inventors:
Harald Liepack, Dresden, DE;
Thomas Merz, Aschaffenburg, DE;
Sebastian Wissel, Karlstein, DE;
Andreas Rack, Grosskrotzenburg, DE;
Assignee:
Solayer GmbH, Kesselsdorf, DE;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
C23C 14/50 (2013.01);
Abstract
Holding devices for receiving a plurality of substrates in a substrate treatment system are disclosed. Holding devices comprise a flange, at least one segment that is releasably disposed on the flange, and at least one carrier for receiving one or a plurality of substrates. The flange has connection faces for disposing the at least one segment on the flange. The at least one segment has a segment support structure. The at least one carrier is assembled on the segment support structure.