The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2022

Filed:

Feb. 21, 2019
Applicant:

National Tsing Hua University, Hsinchu, TW;

Inventors:

Dongliang Daniel Sheu, Hsinchu, TW;

Yi-Hung Lin, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 53/017 (2012.01); H01L 21/321 (2006.01); H01L 21/304 (2006.01); B24B 37/04 (2012.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); B24B 37/042 (2013.01); H01L 21/304 (2013.01); H01L 21/3212 (2013.01);
Abstract

An omni-directional conditioner device includes a carrier that includes a holding part for holding and rotating an object for polishing purpose; a conditioner disposed around the carrier; and a transmission mechanism connected with the carrier on one side and the conditioner on the other side, the transmission mechanism including at least one directional adjustment unit that controls the rotational direction of the conditioner. When the directional adjustment unit is set in one position, the carrier and the conditioner rotate in a same direction, and when the directional adjustment unit is set in another position, the carrier and the conditioner rotate in opposite directions.


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