The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2022

Filed:

Apr. 10, 2018
Applicant:

Kateeva, Inc., Newark, CA (US);

Inventors:

Alexander Sou-Kang Ko, Santa Clara, CA (US);

Prahallad Iyengar, Santa Clara, CA (US);

Robert Dennis Taff, San Ramon, CA (US);

Assignee:

KATEEVA, INC., Newark, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 15/02 (2006.01); F24F 9/00 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
B08B 15/02 (2013.01); F24F 9/00 (2013.01); H01L 51/0005 (2013.01); H01L 51/56 (2013.01); F24F 2009/005 (2013.01);
Abstract

What is disclosed herein are embodiments of an enclosed manufacturing system configured to provide a controlled process environment for various articles of manufacture requiring a controlled process environment, and additionally to contain a process environment within the enclosure during periods of external access to the interior of the enclosed manufacturing system. Various embodiments of manufacturing systems of the present teaching can contain the environment within a manufacturing enclosure so as to minimize the interaction of an environment external to a manufacturing enclosure with the internal enclosure environment.


Find Patent Forward Citations

Loading…