The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2022

Filed:

Dec. 05, 2018
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Yuichi Goto, Nagaokakyo, JP;

Masakazu Fukumitsu, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/10 (2006.01); H03H 9/24 (2006.01); B81B 3/00 (2006.01); H03H 9/05 (2006.01); H01L 41/113 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H03H 9/10 (2013.01); B81B 3/0045 (2013.01); B81B 3/0097 (2013.01); H01L 41/1138 (2013.01); H03H 9/0595 (2013.01); H03H 9/15 (2013.01); H03H 9/2405 (2013.01); H03H 9/2489 (2013.01); B81B 2201/0271 (2013.01); B81B 2201/032 (2013.01); B81B 2203/0163 (2013.01); H03H 9/1035 (2013.01); H03H 2009/155 (2013.01); H03H 2009/241 (2013.01); H03H 2009/2442 (2013.01);
Abstract

A resonator that includes a vibrating portion that has a piezoelectric film, and a lower and upper electrodes that face each other with the piezoelectric film interposed therebetween. Moreover, a holding portion is provided at least around a maximum displacement region of the vibrating portion and has an insulating film. A holding arm connects the vibrating portion and the holding portion, and include a conductive portion that is in contact with the insulating film of the holding portion in at least a region that faces the maximum displacement region of the vibrating portion. In addition, the conductive portion is electrically connected to the lower electrode or the upper electrode or is grounded.


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