The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Dec. 19, 2017
Corning Incorporated, Corning, NY (US);
Robert George Manley, Vestal, NY (US);
Karan Mehrotra, Painted Post, NY (US);
Barry James Paddock, Horseheads, NY (US);
Rajesh Vaddi, Corning, NY (US);
Nikolay Zhelev Zhelev, Painted Post, NY (US);
Bin Zhu, Ithaca, NY (US);
Corning Incorporated, Corning, NY (US);
Abstract
A method of fabricating microstructures of polar elastomers includes coating a substrate with a dielectric material including a polar elastomer, coating the dielectric material with a photoresist, exposing the photoresist to ultraviolet (UV) light through a photomask to define a pattern on the photoresist, developing the photoresist to form the pattern on the photoresist, etching the dielectric material to transfer the pattern from the photoresist to the dielectric material, and removing the photoresist from the patterned dielectric material.