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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11329117 B1

PDFFull Text
Date of Patent:
May. 10, 2022

Filed:

May. 19, 2020

Thin film transistor, display apparatus including the same, and manufacturing methods thereof

Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Dongsung Lee, Yongin-si, KR;

Jihwan Kim, Yongin-si, KR;

Jongoh Seo, Yongin-si, KR;

Byungsoo So, Yongin-si, KR;

Dongmin Lee, Yongin-si, KR;

Yeonhee Jeon, Yongin-si, KR;

Jonghoon Choi, Yongin-si, KR;

Byungkyu Son, Yongin-si, KR;

Seunghyun Jang, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;

Attorney:

Cantor Colburn LLP

Primary Examiner:

Douglas M Menz

Int. Cl.
CPC ...
H01L 27/32 (2006.01); H01L 51/56 (2006.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/3262 (2013.01); H01L 21/02488 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02661 (2013.01); H01L 21/02686 (2013.01); H01L 27/1222 (2013.01); H01L 27/1274 (2013.01); H01L 29/66757 (2013.01); H01L 29/78675 (2013.01); H01L 51/56 (2013.01); H01L 2227/323 (2013.01);
Abstract

A method of manufacturing a thin film transistor includes: removing an oxide film on a surface of an amorphous silicon layer by performing a surface cleaning; and forming an active layer by performing a heat treatment on the amorphous silicon layer, where the amorphous silicon layer is changed into crystalline silicon by the heat treatment.

Find Patent Forward Citations

Lee, Dongsung. (2022). Thin film transistor, display apparatus including the same, and manufacturing methods thereof (U.S. Patent No. 11329117). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11329117

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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