The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Nov. 05, 2019
Screen Holdings Co., Ltd., Kyoto, JP;
Abstract
An upper surface of a substrate is supplied with a pre-drying processing liquid which is a solution of a sublimable substance and a solvent. Thereafter, the solvent is evaporated from the pre-drying processing liquid on the substrate and a solid of the sublimable substance is precipitated in the pre-drying processing liquid on the substrate. Thereafter, at least a portion of the solid of the sublimable substance is dissolved in the pre-drying processing liquid on the substrate. Thereafter, the solvent is evaporated from the pre-drying processing liquid in which the solid of the sublimable substance has been dissolved and the solid of the sublimable substance is precipitated onto the substrate. Thereafter, the solid of the sublimable substance is sublimated and removed from the upper surface of the substrate.