The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2022

Filed:

Mar. 22, 2020
Applicant:

Specs Surface Nano Analysis Gmbh, Berlin, DE;

Inventors:

Gerd Schoenhense, Oppenheim, DE;

Thorsten Kampen, Berlin, DE;

Sven Maehl, Berlin, DE;

Oliver Schaff, Berlin, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); H01J 49/06 (2006.01); H01J 49/46 (2006.01); H01J 37/05 (2006.01); H01J 37/04 (2006.01); H01J 37/147 (2006.01); H01J 37/09 (2006.01); H01J 37/10 (2006.01);
U.S. Cl.
CPC ...
H01J 49/06 (2013.01); H01J 37/04 (2013.01); H01J 37/05 (2013.01); H01J 37/09 (2013.01); H01J 37/10 (2013.01); H01J 37/147 (2013.01); H01J 49/46 (2013.01); H01J 2237/24485 (2013.01);
Abstract

An electron imaging apparatusis disclosed, which is configured for an electron transfer along an electron-optical axis OA of an electronemitting sampleto an energy analyzer apparatus, and comprises a sample-side first lens group, an analyzer-side second lens groupand a deflector device, configured to deflect the electronsin an exit plane of the electron imaging apparatusin a deflection direction perpendicular to the electron-optical axis OA. An electron spectrometer apparatus, an electron transfer method and an electron spectrometry method are also described.


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