The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Jul. 08, 2021
Zhongwei Chen, Los Altos Hills, CA (US);
Xiaoming Chen, Sunnyvale, CA (US);
Daniel Tang, Fremont, CA (US);
Liang-fu Fan, Fremont, CA (US);
Zhongwei Chen, Los Altos Hills, CA (US);
Xiaoming Chen, Sunnyvale, CA (US);
Daniel Tang, Fremont, CA (US);
Liang-Fu Fan, Fremont, CA (US);
BORRIES PTE. LTD., Singapore, SG;
Abstract
The present invention provides a digital high-resolution detector for detecting X-ray, UV light or charged particles. In various embodiments, the digital detector comprises an array of CMOS or CCD pixels and a layer of conversion material on top of the array designed for converting incident X-ray, UV light or charged particles into photons for CMOS or CCD sensors to capture. The thin and high-resolution detector of the invention is particularly useful for monitoring and aligning beams in, and optimizing system performance of, an apparatus of charged-particle beam e.g. an electron microscope.