The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Jan. 24, 2019
Applicant:
Mems Drive (Nanjing) Co., Ltd., Nanjing, CN;
Inventors:
Assignee:
MEMS DRIVE (NANJING) CO., LTD., Nanjing, CN;
Primary Examiner:
Int. Cl.
CPC ...
G02B 13/00 (2006.01); G02B 7/09 (2021.01); G03B 17/00 (2021.01); H01L 41/09 (2006.01); G03B 13/32 (2021.01); H02N 1/00 (2006.01); H02N 2/02 (2006.01);
U.S. Cl.
CPC ...
G02B 13/001 (2013.01); G02B 7/09 (2013.01); G03B 13/32 (2013.01); G03B 17/00 (2013.01); H01L 41/0926 (2013.01); H01L 41/0953 (2013.01); H02N 1/008 (2013.01); H02N 2/02 (2013.01); G03B 2205/0061 (2013.01);
Abstract
A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.