The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2022

Filed:

Apr. 23, 2018
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, 's-Gravenhage, NL;

Inventors:

Daniele Piras, Amsterdam, NL;

Paul Louis Maria Joseph van Neer, Bergschenhoek, NL;

Hamed Sadeghian Marnani, Nootdorp, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/42 (2010.01); G01N 29/06 (2006.01); G01N 29/26 (2006.01); G01N 29/265 (2006.01); B82Y 15/00 (2011.01); B82Y 30/00 (2011.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
G01Q 60/42 (2013.01); G01N 29/0681 (2013.01); G01N 29/265 (2013.01); B82Y 15/00 (2013.01); B82Y 30/00 (2013.01); B82Y 35/00 (2013.01); G01N 2291/0422 (2013.01); G01N 2291/0425 (2013.01);
Abstract

Methods and systems for subsurface imaging of nanostructures buried inside a plate shaped substrate are provided. An ultrasonic generator at a side face of the substrate is used to couple ultrasound waves (W) into an interior of the substrate. The interior has or forms a waveguide for propagating the ultrasound waves (W) in a direction (X) along a length of the substrate transverse to the side face. The nanostructures are imaged using an AFM tip to measure an effect (E) at the top surface caused by direct or indirect interaction of the ultrasound waves (W) with the buried nanostructures.


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