The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Dec. 08, 2017
Robert Bosch Gmbh, Stuttgart, DE;
Stefan Zehringer, Reutlingen, DE;
Andreas Duell, Stuttgart, DE;
Arne Dannenberg, Metzingen, DE;
Helmut Grutzeck, Kusterdingen, DE;
Jochen Franz, Reutlingen, DE;
Mike Schwarz, Kusterdingen, DE;
Soeren Zimmermann, Reutlingen, DE;
Stephan Oppl, Pfullingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm spanning the cavity; and a lever element that spans the diaphragm and has a first and second end section on opposite sides of a center section. A first joint element is between the first end section and the substrate and a second joint element is between the center section and the diaphragm. The lever element can be pivoted due to a deflection of the diaphragm. Two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes are disposed so that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Also, an actuator is provided for applying an actuating force between the lever element and the substrate.