The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Oct. 20, 2020
Bruker Optik Gmbh, Ettlingen, DE;
Axel Keens, Karlsruhe, DE;
BRUKER OPTICS GMBH & CO. KG, Ettlingen, DE;
Abstract
An interferometer arrangement includes a beam splitter (), two retroreflectors (), a drive () that moves at least one of the retroreflectors to alter an optical path difference between interferometer arms (), a converging element () for reference light, and a reference light detector () with at least three detector areas (-). First and second pairs of detector areas are aligned in respective first and second directions, wherein the first direction, the second direction and a central propagation direction of the reference light at the reference light detector are linearly independent. At least two actuators () alter a lateral shear between two reference light partial beams (), which are reflected back from the interferometer arms and superimposed at the beam splitter, in at least two degrees of freedom. Control electronics () control the actuators depending on signals (Sa-Sc) at the detector areas, thereby minimizing the shear.