The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Aug. 20, 2020
Applicant:
Ntn Corporation, Osaka, JP;
Inventor:
Hiroaki Ohba, Iwata, JP;
Assignee:
NTN CORPORATION, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/0209 (2022.01); G01B 11/06 (2006.01); B05C 11/10 (2006.01); B05C 1/02 (2006.01); G01B 9/02001 (2022.01); B05C 5/02 (2006.01);
U.S. Cl.
CPC ...
G01B 11/0675 (2013.01); B05C 1/027 (2013.01); B05C 5/02 (2013.01); B05C 11/1018 (2013.01); G01B 9/0209 (2013.01); G01B 9/02012 (2013.01); G01B 11/0608 (2013.01); G01B 11/0683 (2013.01); G01B 2210/48 (2013.01);
Abstract
A height detection apparatus successively changes the brightness of white light from a first level to a second level in accordance with a position of a Z stage and captures an image of interference light while moving a two-beam interference objective lens relative to a paste film in an optical axis direction, detects, as a focus position, a position of the Z stage where the intensity of interference light is highest in a period during which the brightness of white light is set to the first or second level, for each pixel of the captured image, and obtains the height of the paste film based on a detection result.