The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Aug. 07, 2019
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Tsukasa Funasaka, Shiojiri, JP;
Yuki Hanamura, Azumino, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 45/047 (2006.01); F04B 43/00 (2006.01); F04B 43/04 (2006.01);
U.S. Cl.
CPC ...
F04B 45/047 (2013.01); F04B 43/0054 (2013.01); F04B 43/0081 (2013.01); F04B 43/04 (2013.01);
Abstract
A diaphragm-type compressor includes a substrate, a diaphragm, and an actuator, the substrate, the diaphragm, and the actuator being laminated and provided in this order. In a plan view from a direction of the lamination, the diaphragm includes a first film section that overlaps the actuator and a second film section that does not overlap the actuator. A step is provided on a surface at the diaphragm side of the substrate. A portion corresponding to the first film section and a portion corresponding to the second film section of the substrate are respectively different stages.