The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Feb. 07, 2014
Applicant:
Uchicago Argonne Llc, Argonne, IL (US);
Inventors:
Anil U. Mane, Downers Grove, IL (US);
Joseph Libera, Clarendon Hills, IL (US);
Jeffrey W. Elam, Elmhurst, IL (US);
Assignee:
UChicago Argonne, LLC, Chicago, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01J 43/24 (2006.01); C04B 38/00 (2006.01); C23C 16/04 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45565 (2013.01); C04B 38/0096 (2013.01); C23C 16/045 (2013.01); C23C 16/45544 (2013.01); H01J 43/246 (2013.01); H01J 2231/5016 (2013.01);
Abstract
A system and method for improved atomic layer deposition. The system includes a top showerhead plate, a substrate and a bottom showerhead plate. The substrate includes a porous microchannel plate and a substrate holder is positioned in the system to insure flow-through of the gas precursor.