Semiconductor die containing dummy metallic pads and methods of forming the same

Abstract

A first semiconductor die includes first semiconductor devices located over a first substrate, first interconnect-level dielectric layers embedding first metal interconnect structures and located over the first semiconductor devices, a first pad-level dielectric layer embedding first bonding pads and located over the first interconnect-level dielectric layers, and first edge seal structures laterally surrounding the first semiconductor devices. Each of the first edge seal structures vertically extends from the first substrate to a distal surface of the first pad-level dielectric layer, and includes a respective first pad-level ring structure that continuously extends around the first semiconductor devices. At least one row of first dummy metal pads is embedded in the first pad-level dielectric layer between a respective pair of first edge seal structures. Second pad-level ring structures embedded in a second semiconductor die can be bonded to the rows of first dummy metal pads.