The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Jun. 02, 2021
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/306 (2006.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01); B05B 1/14 (2006.01); B08B 1/00 (2006.01); B08B 1/04 (2006.01); B08B 1/02 (2006.01); B24B 37/34 (2012.01); B08B 3/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); B05B 1/14 (2013.01); B08B 1/002 (2013.01); B08B 1/02 (2013.01); B08B 1/04 (2013.01); B08B 3/022 (2013.01); B08B 3/024 (2013.01); B08B 3/041 (2013.01); B08B 3/08 (2013.01); B24B 37/34 (2013.01); H01L 21/30625 (2013.01);
Abstract
A method of processing a substrate may include preparing the substrate, polishing the substrate, and cleaning the substrate using a double nozzle, which is configured to provide a spray and a chemical solution onto the substrate. The spray may include a deionized water, and the chemical solution may be diluted with the deionized water. The chemical solution and the spray may be spaced apart from each other by a distance of 7 cm to 12 cm.