The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2022

Filed:

Mar. 11, 2020
Applicant:

Nissin Ion Equipment Co., Ltd., Kyoto, JP;

Inventors:

Daiki Takashima, Kyoto, JP;

Ippei Nishimura, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/30 (2006.01); H01J 49/02 (2006.01);
U.S. Cl.
CPC ...
H01J 49/30 (2013.01); H01J 49/02 (2013.01);
Abstract

Provided is a mass separator () for performing mass separation for an ion beam (IB). The mass separator () includes a transfer structure () that is a component of a yoke () and move at least one of an upper yoke () positioned over the beam path (L), a lower yoke () positioned under the beam path (L), and a side yoke () positioned at a side of the beam path (L) between a normal position (P) in the traveling of the ion beam (IB) and a retracted position (Q) that does not overlap with at least a part of the normal position (P); the yoke () is surrounding the beam path (L) and is made of a magnetic body.


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