The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2022

Filed:

Nov. 25, 2019
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Teruo Takizawa, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/5705 (2012.01); G01P 15/08 (2006.01); G01C 19/5733 (2012.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); G01C 19/5705 (2013.01); G01C 19/5733 (2013.01); B81B 2201/0235 (2013.01);
Abstract

An acceleration sensor includes a substrate, a first movable body that includes a first movable portion and a second movable portion having a rotational moment around a first swinging axis smaller than that of the first movable portion, a second movable body that includes a third movable portion and a fourth movable portion having a rotational moment around a second swinging axis smaller than that of the third movable portion, a first fixed electrode that is disposed on the substrate and faces the first movable portion, a second fixed electrode that faces the second movable portion, a third fixed electrode that faces the third movable portion, a fourth fixed electrode that faces the fourth movable portion, and a coupling portion that couples the first movable body and the second movable body.


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