The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2022

Filed:

Mar. 24, 2020
Applicant:

Atonarp Inc., Tokyo, JP;

Inventors:

Naoki Takahashi, Tokyo, JP;

Prakash Sreedhar Murthy, Tokyo, JP;

Assignee:

ATONARP INC., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/64 (2006.01); H01J 49/14 (2006.01); H01J 49/42 (2006.01);
U.S. Cl.
CPC ...
G01N 27/64 (2013.01); H01J 49/14 (2013.01); H01J 49/4215 (2013.01);
Abstract

There is provided a gas analyzer apparatus that analyzes inflowing sample gas. The gas analyzer apparatus includes a filter unit that filters the sample gas, a detector unit that detects the result of filtering, a housing that houses these elements, and a control unit that controls the respective potentials of these elements. The control unit includes a cleaning control unit that sets the respective potentials of the filter unit, the detector unit, and the housing to cleaning potentials that draws in, as plasma for cleaning purposes, process plasma from a source that supplies the sample gas or plasma generated by a plasma generation unit.


Find Patent Forward Citations

Loading…