The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2022

Filed:

Aug. 03, 2021
Applicant:

King Abdulaziz University, Jeddah, SA;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/407 (2006.01); G01N 27/30 (2006.01); H01L 21/02 (2006.01); B82B 3/00 (2006.01); B82Y 15/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G01N 27/407 (2013.01); B82B 3/0014 (2013.01); B82Y 15/00 (2013.01); B82Y 40/00 (2013.01); G01N 27/304 (2013.01); H01L 21/02181 (2013.01);
Abstract

A method of making an array of aligned hafnium oxide nanotubes is provided. The method includes generating a first reactant gas from a first solution comprising a first hafnium precursor dissolved in a first solvent. Directing the flow of the first reactant gas over a substrate to form a seed layer that comprises particles of hafnium oxide. The method further includes generating a second reactant gas from a second solution comprising a second hafnium precursor dissolved in a second solvent. Directing the flow of the second reactant gas over the seed layer to form the array of aligned hafnium oxide nanotubes substantially perpendicular on a surface of the substrate. A method of using the array of aligned hafnium oxide tubes for detection of toxic gases in a gas sample is also provided.


Find Patent Forward Citations

Loading…